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    Semiconductor Transfer System Business

    • Wafer Transfer Robot Series

      1. 4-Axis Cleaning Robot
      2. 3-Axis Clean Robot
      3. Glass Substrate Cleaning Robot

    • Wafer Transfer Device Series

      1. Wafer Cassette Changer
      2. Wafer Transfer Device
      3. EFEM & Sorter

    Semiconductor Cleaning Equipment Business

    • Wafer Cleaning Equipment Series

      1. Automatic Wafer Demounter
      2. Batch Type Wafer Cleaner
      3. Single Type Wafer Cleaner
      4. Carrier Substrate Receiving Cleaning Device
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    • Semiconductor Equipment Manufacturing Process
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