Products

Automatic Wafer Demounter PWD2020

This is an automatic wafer demounter machine after wire saw (slicing). By setting the ingot adhered to the plate jig on the input side, it is a system that performs coarse cleaning, wafer Demounter, wafer leaf cleaning, drying, and cassette storage all automatically. The plate jig after demounter is discharged on the unloader side.
The Demounter is done by hot air heating method, one by one. The peeled wafer is cleaned by a sheet method. After high-pressure cleaning with two fluids, scrub cleaning, rinse cleaning, water absorption roller drying, and slit nozzle drying, each wafer is stored in the cassette of the unloader part by a horizontal multi-joint robot. The storage can be selected from the upper or lower part of the cassette (25 pieces). The storage cassette can hold up to 6 pieces. It supports OHT transport.

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Specifications

Storage
Cassette (25 pieces)
Storage Cassette
Up to 6 (can be considered)
Plate Fixture
NTC-made, MB-made, KOYO-made
Drive Method
Motor Drive (Servo)
Power Supply
AC200V, 100A
Safety Mechanism
Cassette presence or absence, Wafer presence or absence, Overload detection, Alarm, Emergency stop
Device Weight
About 5,000kg
Options
Loader ID Reader, Unloader RFID, Wafer flip, Storage in multiple cassettes, Area sensor, etc.

Automatic Wafer Demounter PWD2010

Type0
Type1
Supported Size
Ø4 - 8″
Supported Size
Ø4 - 8″
Components
Demounter Unit
Cleaning Unit 1
Cleaning Unit 2
Wafer Transport Unit
Components
Demounter Unit
Cleaning Unit 1
Cleaning Unit 2
Wafer Transport Unit
Transport Unit
Loader
Unloader

Automatic Wafer Demounter PWD2020

Type0
Type1
Supported Size
Ø12″
Supported Size
Ø12″
Components
Demounter Unit
Cleaning Unit 1
Cleaning Unit 2
Wafer Transport Unit
Components
Demounter Unit
Cleaning Unit 1
Cleaning Unit 2
Wafer Transport Unit
Transport Unit
Loader
Unloader

Features

  • Unique control with a sliding mechanism.
  • Automates the difficult cleaning process after wafer demounter.
  • Automatically washes wafers cut by a wire saw in sheets after demounter them from the beam, and stores them in a cassette.
  • Achieves low running costs.
  • Design can be customized to fit your ingot lifter.
  • Option to add a loader ID reader.
  • Option to add RFID functionality to the unloader carrier part.

Introduction Examples

Want to automate manual demounter
Want to manage wafer information

Possible Considerations

Number of cassette stages, automation, work size, design compatible with input lifters, etc.