Products

Glass Substrate Cleaning Robot PHT2200

This product is a horizontal multi-joint robot for transporting glass substrates for interposers used in clean rooms. It is capable of front/back (X-axis), rotation (θ-axis), and up/down (Z-axis) movements, suitable for transporting wafers in the atmosphere. The drive motor uses an AC servo motor with absolute encoders on all axes.

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Specifications

Model
PHT2200
Load Capacity
10kg (total weight of the hand base, hand, and workpiece)
Arm
Single arm
Material: Aluminum, CFRP, Ceramic
Installation Environment
Inside Clean Room
Atmospheric temperature 10℃～35℃,
humidity below 70% RH
Operating Range
X-axis: 1050mm
θ-axis: 340deg
Z-axis: 400mm
Operation Speed (Fastest)
X-axis: 500mm/sec
θ-axis: 200deg/sec
Z-axis: 250mm/sec

Standard Robot Specifications

Robot Model
PHT-R-3-2200
Control Cable
3m (Standard), 5m, 10m
Wafer Retention Method
Vacuum Adsorption, Edge Clamp, Edge Hold
Mechanical Structure Type
Horizontal Multi-Joint Type, Cylindrical Coordinate System
Control Axis
3 Axes
Drive Source
Extension, rotation, up and down: 3-axis AC servo drive
Motor Type
AC Servo Motor, Absolute Encoder Specification
Transport Hand
CFRP + PEEK wafer drop-in method
Mapping
Photoelectric through-beam sensor
Carried Objects
Up to 300mm wafer
We also flexibly customize for other special works, shapes, and materials
Weight
Main body weight: approximately 47Kg
Controller: approximately 8Kg
Control Specifications (1)
Parallel Interface
Input 32 points, Output 32 points
Control Specifications (2)
Serial Interface
RS-232C × 1 line
Repeatability
±0.1mm or less
Cleanliness
ISO Class 2 (0.1μm or larger, 10 particles/m3 or fewer)
Utility
Rated Voltage: Single phase AC200～230V ± 10%
Rated Current: 5A
Vacuum: Below -80kPa, 10NL/min or more
Controller Specifications
Controller Type
MFD
Interface
RS232C 1 line Digital IO
Input: 32 points・DC24V 8mA
Output: 32 points・DC24V ± 3V 0.1A or less

Exterior Diagram (Standard Specification)

The contents of this diagram are confidential and owned by PHT Inc. We kindly request not to duplicate or disclose it to third parties without permission.