EFEM・SORTER
EFEF・SORTER
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Equipment specifications
| Model | TYK2102-2 | TYK2102-3 |
|---|---|---|
| Number of ports | 2Ports | 3Ports |
| Transport target | 300mm wafer Diameter: Φ300±0.2mm Thickness: 775μm | |
| Career | 300mm FOUP 25 stages (SEMI E47.1) 300mm FOSB 25 stages (SEMI M31) |
|
| Power voltage | Single phase AC200V±10% 50/60Hz±5% | |
| Consumption current | 4kVA (20A/200VAC) including FFU | |
| Vacuum (original pressure) | -80kPa～-90kPa | |
| Vacuum (flow rate) | 40L/min | 50L/min |
| Positive pressure (original pressure) | 0.6MPa～0.7MPa | |
| Positive pressure (flow rate) | 20L/min | 30L/min |
| EMO contact output | 2 lines (dry contact) | |
| Interlock | 8 inputs/8 outputs (isolated I/O) | |
Overview
Equipped with a high-performance AC servo motor, it achieves high-speed transfer with ample payload capacity. Robots, load ports, and hands can be arranged optimally. Inheriting more than 20 years of robot technology operating in harsh environments.
Features
- 1 or 2 aligners can be installed, enabling high throughput
- Various variations, custom correspondence
- 200mm/300mm compatible