Products

EFEM & Sorter P-EFEM

Equipped with a high-performance AC servo motor, it achieves high-speed transport with a sufficient load capacity. Optimal placement of the robot, load port, and hand is possible. It inherits over 20 years of robot technology operating in harsh environments.

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Specifications

Wafer Size
300mm Wafer
Diameter: Ø300 ± 0.2mm Thickness: 775μm
Carrier
300mm FOUP 25 stages (SEMI E47.1)
300mm FOSB 25 stages (SEMI M31)
Power Supply Voltage
Single-phase AC200V±10% 50/60Hz±5%
Power Consumption
4kVA (20A/200VAC) including FFU
Vacuum (Primary Pressure)
-80kPa～-90kPa
Positive Pressure (Primary Pressure)
0.6MPa～0.7MPa
EMO Contact Output
2 circuits (dry contact)
Interlock
Input 8 points/Output 8 points (Insulated I/O)

Compare

TYK2102-2
TYK2102-3
Load Port
2 Ports
Load Port
3 Ports
Vacuum (Flow rate)
40L/min
Vacuum (Flow rate)
50L/min
Positive Pressure (Flow rate)
20L/min
Positive Pressure (Flow rate)
30L/min

Features

  • Possible to mount 1 or 2 aligners, high throughput is possible
  • Various variations, custom support
  • Possible to use for both 200mm/300mm