This product is a horizontal articulated robot used in clean rooms.
Back and forth (X-axis), swivel (θ-axis), up-and-down (Z-axis) + hand rotation (0 to 180°) operations are possible, supporting wafer transfer in the atmosphere. The drive motor is an AC servomotor with absolute encoder specifications for all axes.
|Installation environment||Inside the clean room, in the atmosphere, temperature: 10°C to 35°C, humidity: 70% RH or less|
Material: aluminum, CFRP, ceramic
|Operating range||X-axis: 500mm, θ-axis: 340deg, Z-axis: 300mm, Hand rotation: 0-180°|
|Operating speed (fastest)||X-axis: 500mm/sec, θ-axis: 200deg/sec, Z-axis: 250mm/sec, Hand rotation: 180deg/sec|
|Transportable mass||3kg (total weight of hand base, hand and workpiece)|
|Transported object||～300mm wafer
(We also flexibly customize other special workpieces, shapes, and materials.)
|Wafer holding method||Vacuum adsorption/edge clamp/edge hold|
|Machine structure type||Horizontal articulated type,Cylindrical coordinate system|
|Control axis||4 axes|
|Motor type||AC servo motor,Absolute encoder specifications|
|Weight||Body weight: approx. 47kg; Controller: approx. 8kg|
|Control cable||3m (standard), 5m, 10m|
|Control specification (1)||Parallel interface
Input 32 points
Output 32 points
|Control specification (2)||Serial interface
RS-232C x 1 line
|Repeatability||±0.1mm or less|
|Degree of cleanliness||ISO class 2 (0.1μm or more, 10pieces/m³ or less)|
|Utility||Rated voltage: Single-phase AC200-230V±10%
Rated current: 5A
Vacuum: -80kPa or less 10NL/min or more
|Interface||RS232C 1 line Digital IO input: 32 points, DC24V 8mA Output: 32 points, DC24V±3V 0.1A or less|
This drawing and the information contained in it are confidential and property of PHT.
Thus cannot be copied or disclosed to a third party without the consent of PHT.