Wafer Cassette Changer

Wafer Cassette Changer PCT2022

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Equipment specifications

Treated material
1.Dicing frame
Size 200mm・300mm
Thickness 1.22 ± 0.08mm
Warp 0.25mm or less
Contactable range Back side
Standard cassette Cassette with 6 sheets・Cassette with 13 sheets
Frame storage pitch 15mm
Takt time・Transportation time 180 seconds/13 sheets or less


This equipment is a system that replaces the dicing frame for 200mm and 300mm stored in a specified cassette with a standard cassette.

The cassettes used are 6-sheet cassettes and 13-sheet cassettes. Each cassette is supplied to the stage by an operator.