Wafer Cassette Changer
Wafer Cassette Changer PCT2022
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Equipment specifications
Treated material
1．Dicing frame
Size
200mm・300mm
Thickness
1.22 ± 0.08mm
Warp
0.25mm or less
Contactable range
Back side
2．Career
Standard cassette
Cassette with 6 sheets・Cassette with 13 sheets
Frame storage pitch
15mm
3．Throughput
Takt time・Transportation time
180 seconds/13 sheets or less
Overview
This equipment is a system that replaces the dicing frame for 200mm and 300mm stored in a specified cassette with a standard cassette.
The cassettes used are 6-sheet cassettes and 13-sheet cassettes. Each cassette is supplied to the stage by an operator.