R&D Center Locations | PHT Inc. | Design, manufacture and sale of semiconductor wafer transfer robot ・wafer cleaner and laser application related equipment | Transfer and cleaning solutions for silicon wafers, SiC, GaN power semiconductors, and compound semiconductors

PHT leverages cutting-edge robotic technology as its core to provide high-precision and highly reliable solutions for semiconductor transport and cleaning systems worldwide.

Centered around its Tokyo headquarters, PHT operates three manufacturing sites in Japan and the United States, and utilizes a sales and service network spanning Asia (Japan, Taiwan, Mainland China, South Korea) and North America (United States) to respond swiftly and reliably to the needs of the global market.

Japan
China
Taiwan
United States

JAPAN
  • PHT Inc.
  • Phoenix Engineering Co.,Ltd.

Registered Address

Sunny Hills 1F
1-41-12 Akabane, Kita-ku, Tokyo 115-0045, Japan

TEL 03-6750-5232

Business Description:
  • Sales and Marketing
Business Field:
  • Life Sciences Division
Global Headquarters

6F Senshu Building
2-69-2 Akabane, Kita-ku, Tokyo 115-0045, Japan

TEL 03-6751-7153

Business Description:
  • Sales and Business Planning
Business Fields:
  • Semiconductor Division
  • Business Planning Office
  • General Affairs, Accounting, and Audit Office
R&D Center

1898-5 Nakanara
Kumagaya City, Saitama Prefecture, 360-0801, Japan

TEL 048-578-5047

Business Description:
  • Procurement, Design, and Development
Business Fields:
  • Procurement Office
  • Design and Development Office
Manufacturing Plant 1
Gunma Prefecture, Isesaki Plant

25-5 Showa-cho
Isesaki City, Gunma Prefecture 372-0014, Japan

TEL 0270-75-2492

Business Description:
  • Manufacturing
Business Fields:

Semiconductor Transport System Business

  • Design, development, manufacturing, and sales of wafer transport robot systems and laser application systems for semiconductors
  • Design, development, manufacturing, and sales of glass substrate transport robot systems and laser application systems for LCDs
Manufacturing Plant 2
Gunma Prefecture, Oizumi Plant

1250-1 Yorikido
Oizumi Town, Ora District, Gunma Prefecture 370-0535, Japan

TEL 0276-50-1456

Business Description:
  • Manufacturing
Business Fields:

Semiconductor Cleaning Equipment Business

  • Design, development, manufacturing, and sales of automatic wafer stripping equipment and automatic wafer cleaning equipment (batch type and single-wafer type)
  • Supported processes: post-wire saw cleaning, post-lapping cleaning, alkaline etching cleaning, pre-heat treatment cleaning, post-heat treatment cleaning, post-polishing cleaning, and final cleaning (FINAL cleaning) related equipment

CHINA
  • PHT Robot Inc.

Room A401, Qizhi Micro-Nano Innovation Park, No. 8 Beidangtian Lane, Suzhou Industrial Park, Suzhou, China

TEL +86-0512-5560-0059

Business Description:
  • Sales
Business Fields:
  • Sales and maintenance of semiconductor manufacturing equipment

TAIWAN
  • JT Wafer Taiwan Branch

No. 195, Sec. 2, Changxing Rd., Luzhu Dist.,
Taoyuan City, Taiwan 338020

TEL +886-3-3160322

Business Description:
  • Sales
Business Fields:
  • Processing and sales of semiconductor equipment, materials, and components

UNITED STATES
  • Advanced Special Tools Inc.

Advanced Special Tools Inc.

320 Clark Road, Battle Creek, MI. 49037, USA

TEL +1-269-962-9697

Business Description:
  • Manufacturing and Sales
Business Fields:
  • Design, processing, and sales of automotive-related precision molds
  • Sales of semiconductor manufacturing equipment, materials, and components
  • Manufacturing and sales of radiation dosimeter components