Products

4-Axis Cleaning Robot PHT-R-4

This product is a horizontal articulated robot used in clean rooms.
Back and forth (X-axis), swivel (θ-axis), up-and-down (Z-axis) + hand rotation (0 to 180°) operations are possible, supporting wafer transfer in the atmosphere. The drive motor is an AC servomotor with absolute encoder specifications for all axes.

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Specifications

Model
PHT-R-4
Load Capacity
3kg (total weight of the hand base, hand, and workpiece)
Arm
Single arm
Material: Aluminum, CFRP, Ceramic
Installation Environment
Inside Clean Room
Atmospheric temperature 10℃～35℃,
humidity below 70% RH
Operating Range
X-axis: 500mm
θ-axis: 340deg
Z-axis: 300mm
Hand Rotation: 0～180°
Operation Speed (Fastest)
X-axis: 500mm/sec
θ-axis: 200deg/sec
Z-axis: 250mm/sec
Hand Rotation: 180deg/sec

Standard Robot Specifications

Robot Model
PHT-R-4-2022
Control Cable
3m (Standard), 5m, 10m
Wafer Retention Method
Vacuum Adsorption, Edge Clamp, Edge Hold
Mechanical Structure Type
Horizontal Multi-Joint Type, Cylindrical Coordinate System
Control Axis
4 Axes
Motor Type
AC Servo Motor, Absolute Encoder Specification
Weight
Body Weight: Approximately 47Kg
Controller: Approximately 8Kg
Carried Objects
Up to 300mm wafer
We also flexibly customize for other special works, shapes, and materials
Control Specifications (1)
Parallel Interface
Input 32 points, Output 32 points
Control Specifications (2)
Serial Interface
RS-232C × 1 line
Repeatability
±0.1mm or less
Cleanliness
ISO Class 2 (0.1μm or larger, 10 particles/m3 or fewer)
Utility
Rated Voltage: Single phase AC200～230V ± 10%
Rated Current: 5A
Vacuum: Below -80kPa, 10NL/min or more
Controller Specifications
Controller Type
MFD
Interface
RS232C 1 line, Digital IO
Input: 32 points, DC24V, 8mA
Output: 32 points, DC24V, ±3V, 0.1A or less

Exterior Diagram (Standard Specification)

The contents of this diagram are confidential and owned by PHT Inc. We kindly request not to duplicate or disclose it to third parties without permission.