Products

Glass Substrate Cleaning Robot PHT2200

This product is a horizontal multi-joint robot for transporting glass substrates for interposers used in clean rooms. It supports movements in the forward/backward direction (X-axis), rotational motion (θ-axis), and up/down motion (Z-axis), and is capable of transferring glass substrates in atmospheric conditions. The drive motor uses an AC servo motor with absolute encoders on all axes.

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Specifications

Model
PHT2200
Load Capacity
10kg (total weight of the hand base, hand, and workpiece)
Arm
Single arm
Material: Aluminum, CFRP, Ceramic
Installation Environment
Inside Clean Room
Atmospheric temperature 10℃～35℃,
humidity below 70% RH
Operating Range
X-axis: 1050mm
θ-axis: 340deg
Z-axis: 400mm
Operation Speed (Fastest)
X-axis: 500mm/sec
θ-axis: 200deg/sec
Z-axis: 250mm/sec

Standard Robot Specifications

Robot Model
PHT-R-3-2200
Control Cable
3m (Standard), 5m, 10m
Glass Substrate Holding Method
Vacuum Adsorption, Edge Clamp, Edge Hold
Mechanical Structure Type
Horizontal Multi-Joint Type, Cylindrical Coordinate System
Control Axis
3 Axes
Drive Source
Extension, rotation, up and down: 3-axis AC servo drive
Motor Type
AC Servo Motor, Absolute Encoder Specification
Transport Hand
CFRP + PEEK glass substrate drop-in method
Mapping
Photoelectric through-beam sensor
Carried Objects
Up to 300mm wafer
We also flexibly customize for other special works, shapes, and materials
Weight
Main body weight: approximately 47Kg
Controller: approximately 8Kg
Control Specifications (1)
Parallel Interface
Input 32 points, Output 32 points
Control Specifications (2)
Serial Interface
RS-232C × 1 line
Repeatability
±0.1mm or less
Cleanliness
ISO Class 2 (0.1μm or larger, 10 particles/m3 or fewer)
Utility
Rated Voltage: Single phase AC200～230V ± 10%
Rated Current: 5A
Vacuum: Below -80kPa, 10NL/min or more
Controller Specifications
Controller Type
MFD
Interface
RS232C 1 line Digital IO
Input: 32 points・DC24V 8mA
Output: 32 points・DC24V ± 3V 0.1A or less

Exterior Diagram (Standard Specification)

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