Products

Wafer Cassette Changer PCT2022

This device is a system that replaces 200mm and 300mm dicing frames stored in a specified cassette with a standard cassette.
The cassettes used are 6-piece cassettes and 13-piece cassettes. The operator supplies each cassette to the stage.

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Specifications

Dicing Frame
Size
200mm・300mm
Thickness
1.22 ± 0.08mm
Warp
0.25mm or less
Possible Contact Area
Backside
Carrier
Standard Cassette
6-piece cassette・13-piece cassette
Frame Storage Pitch
15mm
Throughput
Tact Time / Transfer Time
180 seconds / 13 pieces or less