Products

3-Axis Cleaning Robot PHT-R-3

This product is a horizontal multi-joint robot for use in clean rooms.
It can move forward and backward (X-axis), rotate (θ-axis), move up and down (Z-axis), and rotate the hand (0~180°), and it can handle the transportation of wafers in the atmosphere. The drive motor is an AC servo motor with absolute encoders on all axes.

Download the Brochure Contact Us

Specifications

Model
PHT-R-3
Load Capacity
3kg (total weight of the hand base, hand, and workpiece)
Arm
Single arm
Material: Aluminum, CFRP, Ceramic
Installation Environment
Inside Clean Room
Atmospheric temperature 10℃～35℃,
humidity below 70% RH
Operating Range
X-axis: 500mm
θ-axis: 340deg
Z-axis: 300mm
Hand Rotation: 0～180°
Operation Speed (Fastest)
X-axis: 500mm/sec
θ-axis: 200deg/sec
Z-axis: 250mm/sec
Hand Rotation: 180deg/sec

Standard Robot Specifications

Robot Model
PHT-R-3-2024
Control Cable
3m (Standard), 5m, 10m
Wafer Retention Method
Vacuum Adsorption, Edge Clamp, Edge Hold
Mechanical Structure Type
Horizontal Multi-Joint Type, Cylindrical Coordinate System
Control Axis
3 Axes
Drive Source
Extension, rotation, up and down: 3-axis AC servo drive
Motor Type
AC Servo Motor, Absolute Encoder Specification
Transport Hand
CFRP + PEEK wafer drop-in method
Mapping
Photoelectric through-beam sensor
Repeatability
±0.1mm or less
Weight
Main body weight: approximately 47Kg
Controller: approximately 8Kg
Cleanliness
ISO Class 2 (0.1μm or larger, 10 particles/m3 or fewer)
Control Specifications (1)
Parallel Interface
Input 32 points, Output 32 points
Control Specifications (2)
Serial Interface
RS-232C × 1 line
Utility
Rated Voltage: Single phase AC200～230V ± 10%
Rated Current: 5A
Vacuum: Below -80kPa, 10NL/min or more
Carried Objects
Up to 300mm wafer
We also flexibly customize for other special works, shapes, and materials
Controller Specifications
Controller Type
MFD
Interface
RS232C 1 line Digital IO
Input: 32 points・DC24V 8mA
Output: 32 points・DC24V ± 3V 0.1A or less